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Semiconductor manufacturing

Kaydon has the engineering expertise to develop precision bearing solutions for each step in the silicon chip manufacturing process. From robots to mechanical polishers to photolithography equipment, Kaydon Reali-Slim® thin section bearings provide a space-saving design for smaller, lighter, simpler rotating devices.

Our wide selection of Reali-Slim® bearings can be customized and optimized to minimize friction, outgassing, contamination, corrosion, and even wear, without sacrificing accuracy. Special optional materials and lubricants may permit operating temperatures above 250°C, vacuum levels of 10-8 to 10-12 Torr, minimized particulate generation, and tolerance for corrosive chemical environments. Hybrid bearings can improve torque characteristics and extend life for marginally lubricated applications.

Kaydon Super Duplex bearing assemblies are an ideal solution for high speed, smooth torque applications. Super Duplex bearings feature a common race with two bearing paths that are ground at the same time and "run-out" together. This unique design helps to smooth out the potential added torque that would be caused by variations in axial runout. Kaydon cartridge bearing assemblies take this design a step further, with both a single outer and a single inner raceway to provide the absolute best possible torque performance. Like the Super Duplex, this design eliminates potential alignment and orientation installation errors that can result when using duplexed pairs of angular contact bearings.

Shields or seals can be added without increasing bearing space requirements. Seals are often used in atmospheric environments, while shields are ideal for vacuum and other ultra-clean environments. Because shields don't quite touch the inner race, there's no torque penalty or particle generation.



  • Inspection equipment
  • Wafer probers
  • Sputtering equipment
  • Wafer transfer systems
  • Dispensing
  • Pick and place robotics
  • Measuring systems
  • Test head
  • Positioners
  • Dicing equipment
  • Lapping equipment
  • Vacuum deposition systems
  • Wafer steppers
  • Probe stations
  • Arms
  • Wafer trimmers
  • Wafer scrubbers
  • Wafer polishers
  • Thin-film deposition systems
  • CVD systems
  • Etching systems
  • Mechanical polishers
  • Atmospheric & vacuum transfer
  • Robots
  • Test heads
  • Manipulators
  • Megasonic cleaning systems
  • Spin dryers
  • Photolithography
  • Mechanical polishers
  • Die bonders


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Kaydon Bearings - markets - semiconductor manufacturing - wafer

Kaydon Bearings - markets - semiconductor manufacturing

Kaydon Bearings - markets - semiconductor manufacturing

Kaydon Bearings - markets - semiconductor manufacturing

Kaydon Bearings - markets - semiconductor manufacturing